TIM5->ARR = 0xFFFF;            
    TIM5->PSC = 71;                //72МГцчастота шины/72 = 1Мгц тик таймера
    TIM5->CR1 = 0x0001;            //Запускаю таймер

void Delay(u16 time)            
{
    TIM5->CNT = 0x0000;
    TIM5->ARR = time-1;
    while(!(TIM5->SR & 0x0001))
    {
        __nop();
    }    
    TIM5->SR&= ~0x0001;
}

GPIOE->BSRR|= GPIO_Pin_2; //Установить ногу
Delay(10);                             //Задержка 10мкс.
GPIOE->BRR|= GPIO_Pin_2;   //Сбросить ногу

отключить оптимизацию
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код
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включить оптимизацию

  TIM6->PSC = (72000000 / 10000 - 1);
  TIM6->CR1 = TIM_CR1_OPM | TIM_CR1_URS;

void Timer_delay(uint32_t time) {
  TIM6->ARR = time;            // Autoreload
  TIM6->CR1 |= 0x0001;        // Enable
  while (!TIM6->SR);            // Wait Update Interrupt Flag in Status
  TIM6->SR = 0;                // Status reset
}

    inline void _delay_loops(U32 loops) {
        asm volatile (
            "1: SUBS %[loops], %[loops], #1 \n"
            "   BNE 1b \n"
            : [loops] "+r"(loops)
        );
    }

    #define delay_us( US ) _delay_loops( (U32)((double)US * F_CPU / 3000000.0) )
    #define delay_ms( MS ) _delay_loops( (U32)((double)MS * F_CPU / 3000.0) )
    #define delay_s( S )   _delay_loops( (U32)((double)S  * F_CPU / 3.0) )

  TIM6->PSC = (72000000 / 10000 - 1);    // Prescaler 10 kHz, 0.1 ms
  TIM6->CR1 = TIM_CR1_OPM | TIM_CR1_URS;

void Timer_start(uint32_t time)
{
  TIM6->SR = 0;                // Status reset
  TIM6->ARR = time;            // Autoreload (one pulse)
  TIM6->CR1 |= 0x0001;        // Enable
}

void Timer_wait()
{
  while (!TIM6->SR);            // Wait Update Interrupt Flag in Status
}

typedef        uint32_t                TTimer;
#define        TIMER_COUNTER            LPC_TMR32B0->TC
#define        START_TIMER(tmr)        tmr    = TIMER_COUNTER
#define        TIMER_VALUE(tmr)        (TIMER_COUNTER - tmr)
#define        WAIT_TIMEOUT(tmr,val)    while (!(val <= TIMER_VALUE (tmr)))

__inline void delay_us (TTimer val)
{
    START_TIMER  (TTimer Tmr);    
    WAIT_TIMEOUT (Tmr, val);
}
__inline void delay_ms (TTimer val)
{
    delay_us (val * 1000);
}

; generated by ARM C/C++ Compiler with , RVCT4.0 [Build 524] for uVision
; commandline ArmCC [--debug -c --asm --interleave -omain.o --depend=main.d --device=DARMP1 --apcs=interwork -O3 -IC:\Keil\ARM\INC\NXP --omf_browse=main.crf main.c]
THUMB

AREA ||.text||, CODE, READONLY, ALIGN=2

main PROC
;;;31
;;;32 int main (void)
000000 b530 PUSH {r4,r5,lr}
;;;33 {
;;;34
;;;35 TIM0->CTCR = 0x00;
000002 2000 MOVS r0,#0
000004 f04f2240 MOV r2,#0x40004000
000008 6710 STR r0,[r2,#0x70]
;;;36 TIM0->TCR = 0x02;
00000a 2102 MOVS r1,#2
00000c 6051 STR r1,[r2,#4]
;;;37 TIM0->PR = 0;
00000e 60d0 STR r0,[r2,#0xc]
;;;38 TIM0->TCR = 0x01;
000010 2001 MOVS r0,#1
000012 6050 STR r0,[r2,#4]
;;;39
;;;40
;;;41 GPIO0->FIODIR ^= 0x01;
000014 4c08 LDR r4,|L1.56|
000016 6820 LDR r0,[r4,#0]
000018 f0800001 EOR r0,r0,#1
00001c 6020 STR r0,[r4,#0]
00001e f2427510 MOV r5,#0x2710
|L1.34|
000022 6891 LDR r1,[r2,#8]
000024 462b MOV r3,r5
|L1.38|
000026 6890 LDR r0,[r2,#8]
000028 1a40 SUBS r0,r0,r1
00002a 4298 CMP r0,r3
00002c d3fb BCC |L1.38|
;;;42
;;;43 while (1)
;;;44 {
;;;45 delay_ms (10);
;;;46
;;;47 GPIO0->FIOPIN ^= 0x01;
00002e 6960 LDR r0,[r4,#0x14]
000030 f0800001 EOR r0,r0,#1
000034 6160 STR r0,[r4,#0x14]
000036 e7f4 B |L1.34|
;;;48 }
;;;49
;;;50 ;
;;;51 }
ENDP

|L1.56|
DCD 0x2009c000

__ARM_use_no_argv EQU 0