Dear frnds,
i am new in mems eng..which book could be read first for initials...please refer.

Try this http://rapidshare.com/files/14319264/the_m..._0849300770.pdf

thanks for the reference.....

dear my frnd,
i have read some of this book...thanks for the book. But there seems to be a little problem that is i could find a little physics in this book. i think i should first understand the physics and maths of mem. In this book they start with inner core of mems and got inside more in the later chapters. However should i continue this book or read any other basic and easy book?
please help me. i had to complete my project of my university as early as possible by making or simulating a new type of mems design.

What kind of physics do you mean? Rf and microwaves ? Circuit theory? Technology?